Passive components for micro-fluidic flow profile shaping and related method thereof

ABSTRACT

The present invention relates to microfluidic systems and methods for controlling the flow of fluid using passive components engineered into the microchannels. These passive flow components include fluidic diodes, fluidic capacitors, and fluidic inductors. Various fluidic circuits are provided to control fluid flow including fluid rectifiers, fluid band pass filters, and fluid timers.

This application claims priority to U.S. Provisional Patent ApplicationSer. No. 60/710,702, filed Aug. 23, 2005.

FIELD OF THE INVENTION

The present invention relates to microfluidic systems and methods forcontrolling the flow of fluid using passive components engineered intothe microchannels.

BACKGROUND OF THE INVENTION

Micro-total analysis systems (μ-TAS or Microfluidic chips) may be usedfor biological or chemical assays. For example, μ-TAS may be used toperform biological assays using external control lines that control theopening and closing of on-chip fluidic valves which control the flow offluids in biological assays. The valves are opened and closed usingmacroscopic pressure sources that are located off-chip, and which areconnected through control lines to the chip.

Micro-fluidic valves have been successfully developed using multilayersoft lithography or layering with patterned rigid and elastomericmaterials. These methods hold discernible advantages over microelectromechanical (MEMS) valves such as ease of fabrication, simplicityof design, and low actuation force requirements. Individual valves ofthis kind can be compared to an electronic switch, where an outsidestimulus is required for control. This technology has been combined andutilized for the fabrication and operation of micro-fluidic on/offvalves, switching valves, and pumps.

A limitation of these types of approaches is that, because eachindividual valve is analogous to an electronic switch, each valverequires a separate pressure (positive or negative) control line. Thistype of component can be classified as an active micro-fluidiccomponent. Multiple valves, pumps, etc., are desirable for mostapplications; in some cases, a large number of these active componentsare needed. In these cases, the instrumentation needed for control ofthese miniaturized devices becomes overwhelming with respect tocomplexity, cost, and space requirements. Especially in complex assays,a large number of macroscopic control lines are cumbersome andundesirable.

It is desirable to provide passive micro-fluidic components that allowdefined flow control at the small volume scale (microliter, nanoliter,picoliter, or smaller) and are easy to fabricate. Fluidic componentsanalogous to electrical resistors, diodes, inductors, and capacitorscould provide this control without the necessity for control lines.Micro-fluidic valves could be used only when absolutely necessary, andthe controlling instrumentation could be miniaturized to a scalecomparable or more fitting to the microchip scale and platform.

Passive components with diode-like behavior have been developedpreviously (Holtz at al., Anal. Chem, 1998, 70 (4):780-791; Adams etal., J. Micromech. Microeng. 2005, 15:1517-1521), but these componentsrequire multilayer fluid flow and more complex patterning than isdesired. Nonetheless, with these types of components, the development of‘smart’ devices becomes a possibility, in which the fluid controlfeatures are built entirely into the devices and not theinstrumentation.

Therefore, there remains a need for passively controlling fluid flow ina μ-TAS, without requiring complex control instrumentation or controllines, that can be manufactured inexpensively and easily.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide passive methods andapparatus for precise fluidic control of small volumes.

It is another object of the present invention to provide a fluidic diodethat allows for flow rectification via fluid flow only in one direction.

It is yet another object of the present invention to provide a fluidiccapacitor that provides means for energy storage in the form of fluidvolume.

It is yet another object of the present invention to provide a fluidicinductor that provides means for energy storage in the form of heat.

It is yet another object of the present invention to provide a fluidiccircuit having various combinations of fluid fluidic diode, fluidiccapacitor, and/or fluidic inductor to passively controlling fluid flow.

The major advancement of the present invention is the ability to achieveprecise fluid control of small volumes without the necessity forinstrumentation and hardware to realize on-chip actuation. The passivemicro-fluidic diodes, capacitors, inductors, and combined circuits ofeach provide this capability. For example, FIG. 1 illustrates amicro-fluidic channel architecture in which eight input solutions arerequired to be added in any combination to reaction chamber 9. In anyconfiguration, the device requires eight pressure input lines (1-8), onefor each respective solution. Without the use of valves or passivecomponents (FIG. 1A), there is nothing to prevent backflow of solutionsinto reservoirs 1-8. If active valves are utilized for control, with aprior art design [2] (FIG. 1B), eight separate vacuum or pressure linesand eight separate digital output lines are required for control and toprevent backflow. However, with the use of a passive micro-fluidic diode(FIG. 1C), the nature of the components prevent backflow, providing thedesired functionality without the necessity of any instrumentation otherthan pressure sources for the input solutions. Furthermore, eightdigital lines is a limitation on most computer-based data acquisitionand control cards. In this example, additional functionality on thevalved chip would require multiple cards, introducing additionalhardware requirements and expense.

To achieve the above advantages, layered micro-fluidic devices areprovided which include one or more rigid layer. The rigid substrate canbe any material, including, but not limited to, silicon, glass,ceramics, polymers, metals, and/or quartz, provided that the material ischemically compatible with the solution of flowing through the variouschannels and components in the rigid substrate. Preferably the rigidsubstrate has a thickness of about 0.5-10.0 mm, preferably about 1-5 mm.The elastomeric layer can be any deformable material, including, but notlimited to, polymers such as polydimethylsiloxane (PDMS),polymethylmethacrylate (PMMA) polyisoprene, polybutadiene,polychloroprene, polyisobutylene, poly(styrene-butadiene-styrene),polyurethanes, silicone polymers, poly(bis(fluoroalkoxy)phosphazene)(PNF, Eypel-F), poly(carborane-siloxanes) (Dexsil),poly(acrylonitrile-butadiene) (nitrile rubber), poly(1-butene),poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers (Kel-F),poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidenefluoride-hexafluoropropylene)copolymer (Viton), elastomeric compositionsof polyvinylchloride (PVC), polysulfone, polycarbonate,polytertrafluoroethylene (Teflon), or blends thereof; or semi-rigidsubstrates. Preferably, the elastomeric layer has a thickness of about 5μm-10 mm, preferably about 5 μm-100 μm, and most preferably about 5μm-10 μm. The devices may also include a temperature-controlled platelayer. In a preferred embodiment, the elastomeric layer is sandwichedbetween two rigid layers, where fluid flow is in one of the rigid layer,while the other rigid layer provides recesses for the deflection of theelastomeric layer due to fluid forces. In this configuration, the fluidis constricted to flow in one of the rigid layer, while the elastomericlayer provides the valving or storing function. The devices may alsocontain entirely of deformable materials, including, but not limited to,polymers such as polydimethylsiloxane (PDMS), polymethylmethacrylate(PMMA) polyisoprene, polybutadiene, polychloroprene, polyisobutylene,poly(styrene-butadiene-styrene), polyurethanes, silicone polymers,poly(bis(fluoroalkoxy)phosphazene) (PNF, Eypel-F),poly(carborane-siloxanes) (Dexsil), polyacrylonitrile-butadiene)(nitrile rubber), to poly(1-butene),poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers (Kel-F),poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidenefluoride-hexafluoropropylene)copolymer (Viton), elastomeric compositionsof polyvinylchloride (PVC), polysulfone, polycarbonate,polytertrafluoroethylene (Teflon), or blends thereof. In this case,these elastomeric layers have a thickness of 5 μm-2 cm. Because the flowcan be constricted to one layer, only one patterned layer requiressolution compatibility.

The devices of the present invention include passive flow controlcomponents that provide precise fluidic control without the necessityfor outside control lines, thereby greatly reducing instrumentationrequirements. The passive components are presented as analogs to circuitcomponents in the electronic arts, and thus can be combined in a similarmanner. The passive flow components of the present invention includefluidic diodes, fluidic capacitors, and fluidic inductors.

The fluidic diode provides a directional bias to fluid flow, which canbe compared to a diode in the electronic art. The device contains afirst layer, preferably a rigid layer, having a microfluidic channel forfluid or gas flow (fluid path); a second layer having a recess patternedtherein, which is preferably fabricated in rigid or elastomericmaterial; and a third layer of elastomeric material sandwiched betweenthe first and second layers such that the chamber of the second layer isdirectly above the channel of the first layer and separated therefrom bythe elastomeric third layer. Fluid flow in the device can be restricted,but not limited to, flow in the first layer. The fluidic diode isdesigned such that there is a discontinuity in a microfluidic channel inthe first layer, which is located directly under the chamber of thesecond layer. In a preferred embodiment, immediately on the upstreamside of the discontinuity, the microchannel is significantly wider thanthe channel immediately down stream of the discontinuity, preferablyabout 2-1000 times wider, most preferably about 10-100 times wider. Whenthe fluid pressure upstream of the discontinuity provides sufficientforce to deflect the elastomeric layer upward, away from thediscontinuity, flow along the channel is effected. On the other hand,fluid flow in the reverse direction is inhibited because the more narrowdown stream channel does not generate sufficient force to deflect themore restricted elastomeric layer. As such, flow in only one directionis effected. In another embodiment, the directional bias can berestrictive to negative pressures (vacuum), while allowing flow ofpositive pressures in either direction. In this embodiment, the geometryon either side of the discontinuity can be equal. Importantly, negativepressure will prevent flow through the diode in either direction, usingany geometrical configuration.

The fluidic capacitor provides a means for energy storage in the form offluid volume, and is analogous to a capacitor in the electronic art. Thedevice contains a first layer containing a microfluidic channel forfluid or gas flow (fluid path) thereon, which is preferably fabricatedon a rigid material; a second layer having a recess thereon, preferablyfabricated on a rigid material; and a third layer of elastomericmaterial sandwiched between the first and second layer such that thechamber of the second layer is directly above the channel of the firstlayer and separated therefrom by the elastomeric third layer. In certainembodiments, the third layer can contain multiple sublayers. This deviceallows for volume storage in the mechanically deflected elastomericlayer; and its action is modeled by comparison to the capacitor in theelectronic arts, with similar equations and characteristics. When thepressure in the channel is sufficient to deflect the elastomeric layerinto the chamber of the second layer, the volume of the channel in thefirst layer increased to store fluid; and when the pressure drops theelastomeric layer contracts to its resting position to allow the storedfluid to flow out of the fluidic capacitor. The capacitor functionsequally in either direction. When a negative pressure is present in thechannel, the elastomeric layer (third layer) deflects into the chamberof the first layer, thereby storing a negative volume.

The fluidic inductor provides a means for energy storage in the than ofheat. The device consists of a first layer containing a channel orchamber for either fluid or gas flow, which can be fabricated in rigidor elastomeric material; a second layer of elastomeric material overlaysthe channel or chamber of the first layer; and a third layer containingof a temperature-controlled plate, which should be made of a rigidmaterial suitable for localization and transfer of heat into any of theother three layers. Fluid flow in the device can be restricted, but notlimited to, flow in the first layer. This component provides a means forenergy storage in the form of heat. The heat is stored in the localizedpatterned component by the temperature-controlled plate (third layer),and any changes in flow will be modulated by the changes in density ofthe fluid or gas. The action of this component is analogous to theinductor in the electronic art, with similar equations andcharacteristics

Furthermore, these devices are not limited to electronic arts analogies,for they could be based on novel circuits that exploit behaviorsunavailable with electrical flow. For example, chemical differencesand/or interactions between the flowing solutions provide a realm ofstudy not available with electrical flow.

The present invention also provides a passive component for measurementof fluid pressure. The device consists of a single patterned layer in arigid or elastomeric material that can be combined with any number ofother layers. This component consists of a flow channel analogous to afluidic resistor and provides a means to measure the pressure at anypoint in a fluidic circuit. This fluidic resistance should be kept at alarger value (at least 10 times larger, preferably 100-1000 timeslarger) than that of the channel being measured in order to minimizeinterference and should be placed in parallel to the fluidic circuit ofinterest. The pressure profile can thus be visualized through anyoptical means, monitored by electrical means, or interrogated throughany other analytical means known in the art. The action of thiscomponent is similar to a voltmeter in the electronic arts, whichtypically places a high resistor in parallel to measure voltage. Thiscomponent is referred to as a fluidic pressure meter.

Several micro-fluidic devices are presented that contain combinations ofthe aforementioned components for passive manipulation or measurement offluid or gas flow. The devices consist of several combinations ofpatterned layers, elastomeric layers, or temperature controlled platelayers. Circuit combinations with these passive components are based onthe analogous circuits in the electronic arts. Fluid flow in the devicescan be restricted, but not limited to, flow in the first layer; anddevices are not limited in the number of total layers used. Thesedevices include, but are not limited to, the following: fluidichalf-wave rectifiers, full-wave rectifiers, or bridge rectifiers;fluidic low-pass filters (or integrators), high-pass filters (ordifferentiators), band-pass filters, or other flow transformers; fluidicpressure multipliers, fluidic timers, fluidic diode logic gates. Incombination with active components (e.g., valves, latches) present inthe prior art, these passive components should provide enhancedflexibility for fluid control, while reducing instrumentationrequirements.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a drawing showing an example of a microdevice configurationconsisting of eight different input channels (1-8) leading into a singlereaction chamber (9). (A) With the inability to control fluid flow (e.g.no valves or directional components) solution from any input channel canenter any other channel. (B) With valves on channels 1-8 (shown as ovalsaround discontinuous channels) it is possible to control fluid flow intochamber 9, but active control lines are required for valve actuation.(C) With the proposed passive diodes, it is possible to control the flowfrom channels 1-8 into chamber 9 with no need for actuation lines.

FIG. 2 are drawing showing various views of a preferred embodiment ofthe fluidic diode component. (A) Overhead 2-D view of each layer. (B)3-D view of the stacked device, showing the alignment of thediscontinuity in layer 200 with the recess in layer 202, separated bythe elastomeric layer 204. (C) Side-on and end-on views of the assembleddevice. In the top figure, the device is unaffected and the diode is inits resting state. In the middle figure, flow is directed from one-endof the device and cannot activate the diode because the componentresists the flow pressure. In the bottom figure, flow is directed in theopposite direction and an equal pressure is enough to activate thepassive diode. The resulting deflection of the elastomer membrane intothe layer above allows fluid to flow through the diode. (D) A microscopeimage of a dye filled device showing biased flow from right to leftacross an arbitrary diode geometry. The circuit analog is provided inthe inset.

FIG. 3 is a drawing showing the top view of each of the layers of afluidic diode. (A) Two-dimensional layout of each layer in the fluidicdiode, along with the assembled (stacked) device. Note that the 2^(nd)layer is a mirror image of that in the assembled device, owing to themanner in which the surfaces are aligned and bonded. Access holes forfluid reservoirs are included in the 2^(nd) and 3^(rd) layers to bringsolution to the fluid channels in the 1^(st) layer. An access hole thatacts as a pressure ground for the diode component is included in the2^(nd) layer. (B) An example of a fluidic diode where the patterned1^(st) layer consists of the same geometry on either side of thediscontinuity. (C) An example of a fluidic diode where the patterned1^(st) layer consists of a different geometry on either side of thediscontinuity. Note that the geometry will define whether there is adirectional bias to positive pressures, but the geometry is arbitraryfor negative pressures. Note that the example geometries shown in FIG. 3are chosen merely for demonstration purposes.

FIG. 4 is a drawing showing various views of the fluidic capacitorcomponent. Although these embodiments present a three-layer device, itmay be desirable to use multiple layer patterning in the third,elastomeric layer. (A) Overhead 2-D view of each layer. (B) 3-D view ofthe stacked device, showing the alignment of an enlarged fluidic chamberin layer 400 with the recess in layer 404, separated by the elastomericlayer 408. (C) Side-on and end-on views of the assembled device. In thetop figure, the device is unaffected and the capacitor membrane 408 isin its resting state because the pressure difference between the fluidicpath 402 and the recess 406 is equal to zero. In the middle figure, flowis directed from one-end of the device, creating a pressure differencebetween the fluid path 402 and the recess 406, resulting in a finiteamount of stored volume under the deflected region of the elastomericlayer 408. Although the pressure difference is positive in thisembodiment, the elastomeric layer 408 maintains functionality undernegative pressure differences. In the bottom figure, flow is directed inthe opposite direction and the behavior is the same. (D) A microscopeimage of the capacitor as solution is pumped into the enlarged fluidicchamber. The circuit analog is provided in the inset.

FIG. 5 is a drawing showing the top view of each of the layer of afluidic capacitor in the three-layer embodiment. (A) Two-dimensionallayout of each layer in the fluidic capacitor, along with the assembled(stacked) device. Note that the 2^(nd) layer is a mirror image of thatin the assembled device, owing to the manner in which the surfaces arealigned and bonded. Access holes for fluid reservoirs are included inthe 2^(nd) and 3^(rd) layers to bring solution to the fluid channels inthe 1^(st) layer. An access hole that acts as a pressure ground for thecapacitor component is included in the 2^(nd) layer. (B) An example of afluidic capacitor where the patterned 1^(st) layer consists of the samegeometry on either side of the enlarged fluid chamber. (C) An example ofa fluidic capacitor where the patterned 1^(st) layer consists of adifferent geometry on either side of the enlarged fluid chamber. Notethat the geometry is arbitrary and chosen merely for demonstration.

FIG. 6 is a drawing showing various views of the fluidic inductor iscomponent. (A) Overhead 2-D view of each layer. (B) 3-D view of thestacked device, showing the alignment of a fluid channel in layer 600(shown with an arbitrary geometry) with a heated region in layer 604.(C) Side-on and end-on views of the assembled device. In the top figure,the device is unaffected and the inductor is in its resting state. Inthe middle figure, flow is directed from one-end of the device over theheated region and in the bottom figure, flow is directed in the oppositedirection with the same behavior. (D) The inductor analog.

FIG. 7 is a drawing showing the top view of each of the layer of afluidic inductor. (A) Two-dimensional layout of each layer in thefluidic inductor, along with the assembled (stacked) device. Note thatthe 2^(nd) layer is a mirror image of that in the assembled device,owing to the manner in which the surfaces are aligned and bonded. Accessholes for fluid reservoirs are included in the 2^(nd) and 3^(rd) layersto bring solution to the fluid channels in the 1^(st) layer. (B) Anexample of a fluidic inductor where the patterned 1^(st) layer consistsof the same geometry on either side of the thermal region. (C) Anexample of a fluidic inductor where the patterned 1^(st) layer consistsof a different geometry on either side of the thermal region. Note thatthe geometry is arbitrary and chosen merely for demonstration.

FIG. 8 are drawings and graphs showing the result and design of afluidic rectifier. (A) Prior art design for a diaphragm pump consistingof three active valves. The top image represents the fluid layer, themiddle the valve layer, and the bottom an overlay of the two. (B)Proposed design for a half-wave rectifier using based on a similar pumpdesign consisting of two active valves and a passive diode componentthat imparts directionality. (C) Volumetric displacement andflow/pressure profiles in time comparing the prior art 3-valve diaphragmpump to the proposed 2-valve pump with fluidic diode (half-waverectifier).

FIG. 9 are drawings and graphs showing the result and design of a flowprofile converter. (A) Unidirectional pump using a fluidic diode (top)and the same pump combined with a fluidic capacitor that acts as alow-pass filter. Note the shared connection of the diode and capacitor(gray) to a single ground line. (B) Volumetric displacement andflow/pressure profiles vs. time of the pump alone and the low-passfilter design (˜0.2 Hz cutoff) using a fluidic capacitor to dampen thesquare wave oscillations (4.0 Hz).

FIG. 10 is a drawing showing an embodiment of a combined deviceconsisting of a half-wave rectifier, diodes, and various capacitors tocreate a timing circuit based upon four low-pass filters arranged inparallel with a shared output.

FIG. 11 are drawings showing two embodiments of a bandpass filtercreated from passive fluidic components are presented, using acombination of fluidic resistors (channels) coupled with either (A)capacitors or (B) inductors,

FIG. 12 are a drawing and pictures showing an entirely passive,pre-programmed fluidic timing device. The device design is shown alongwith CCD images of the timed breakthrough of flows in two differentpaths from the same input source.

FIG. 13 are drawings showing various embodiments of the resistancepressure meter. (A) A representation for the fluidic pressure meter,where a large resistance is fabricated through channel dimension andgeometry and connected to ground, where flow can be interrogated toprovide pressure information. (B) The pressure meter connected tovarious fluidic components to demonstrate its utility in analyzing andcharacterizing a microfluidic circuit. (C) A sample component withbuilt-in discontinuity for flexible testing. Under normal operation(top) the fluidic channel is bridged by a short channel. For testing ortroubleshooting, the fluidic channel is bridged by a short channelconnected to a pressure meter (bottom). Note that the pressure meter ismodular and can be used on any component in any circuit provided thediscontinuity is patterned into the fluid layer.

FIG. 14 are (A) a drawing showing a microdevice design arranged into aband-pass configuration with resistors (labeled as R) and capacitors(labeled as C); and (B) its electrical circuit equivalent.

FIG. 15 is a graph showing that characteristic frequencies of theband-pass fluidic circuit (such as that of FIG. 15) could be shifted byover an order of magnitude by locally altering the PDMS membranethicknesses at the capacitor region. Different curves representdifferent combinations of the thicknesses,

FIG. 16 is a drawing showing one method to locally control the thicknessof the elastomeric layer. (A) Two possible embodiments of the typicalthree-layer device. (B) One fabrication method to locally control thethickness of the middle elastomeric layer. In this embodiment,precisely-localized thinned regions of elastomeric membrane are created,

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention is generally directed to microfluidic systems andmethods for controlling the flow of fluid using passive componentsengineered into the microchannels. The term “microfluidic” as usedherein refers to an apparatus for analysis of small volumes of sample,and containing microscale components for fluid processing, such aschannels, pumps, micro-reaction chambers, electrophoresis modules,microchannels, fluid reservoirs, detectors, valves, or mixers. Thesemicrofluidic apparatuses are also referred to as micro-total analysissystems (μTAS). “Micro” as used herein refers to small components and isnot restricted to micron size scale or microliter volume scale, but alsoinclude smaller components in the nanometer size scale or nanoliter topicoliter volume ranges. The passive components used to control fluidflow of the present invention are fluidic diodes, fluidic capacitors,and fluidic inductors.

Microfluidic devices typically include micromachined fluid networks.Fluid samples and reagents are brought into the device through entryports and transported through channels to a reaction chamber, such as athermally controlled reactor where mixing and reactions (e.g.,synthesis, labeling, energy-producing reactions, assays, separations, orbiochemical reactions) occur. The biochemical products may then bemoved, for example, to an analysis module, where data is collected by adetector and transmitted to a recording instrument. The fluidic andelectronic components are preferably designed to be fully compatible infunction and construction with the reactions and reagents.

There are many formats, materials, and size scales for constructingmicrofluidic devices. Common microfluidic devices are disclosed in U.S.Pat. Nos. 6,692,700 to Handique et al.; 6,919,046 to O'Connor et al.;6,551,841 to Wilding et al.; 6,630,353 to Parce et al.; 6,620,625 toWolk et al.; and 6,517,234 to Kopf-Sill et al.; the disclosures of whichare incorporated herein by reference. Typically, a microfluidic deviceis made up of two or more substrates or layers that are bonded together.Microscale components for processing fluids are disposed on a surface ofone or more of the substrates. These microscale components include, butare not limited to, reaction chambers, electrophoresis modules,microchannels, fluid reservoirs, detectors, valves, or mixers. When thesubstrates are bonded together, the microscale components are enclosedand sandwiched between the substrates.

For the present invention, a three layer construction is preferred,where two substrates sandwich a layer of elastomeric material. Thefluidic paths and microscale components are patterned on the surface ofone of the substrates, while the other substrate contains recesses forthe deflection of the elastomeric material where desired. Although theseembodiments present a three-layer device, it may be desirable to usemultiple layer patterning in the third, elastomeric layer to achievelocally differing elastic behaviors.

In many embodiments, inlet and outlet ports are engineered into thedevice for introduction and removal of fluid from the system. Themicroscale components can be linked together to form a fluid network forchemical and/or biological analysis. Those skilled in the art willrecognize that rigid substrates composed of silicon, glass, ceramics,polymers, metals, and/or quartz are all acceptable in the context of thepresent invention. Those skilled in the art will also recognize thatsemi-rigid or elastomeric substrates, composed of polydimethylsiloxane(PDMS), polymethylmethacrylate (PMMA) polyisoprene, polybutadiene,polychloroprene, polyisobutylene, poly(styrene-butadiene-styrene), thepolyurethanes, and silicone polymers, poly(bis(fluoroalkoxy)phosphazene)(PNF, Eypel-F), poly(carborane-siloxanes) (Dexsil),poly(acrylonitrile-butadiene) (nitrile rubber), poly(1-butene),poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers (Kel-F),poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidenefluoride-hexafluoropropylene)copolymer (Viton), elastomeric compositionsof polyvinylchloride (PVC), polysulfone, polycarbonate,polytertrafluoroethylene (Teflon), and blends thereof, are allacceptable in the context of the present invention. Further, the designand construction of the microfluidic network vary depending on theanalysis being performed and are within the ability of those skilled inthe art. In addition to the substrates or layers of the prior art usedin the construction of microfluidic devices, the present invention alsoincorporates elastomeric materials to effect passive components forcontrolling fluid flow, which include fluidic diodes, fluidiccapacitors, and fluidic inductors.

Fluidic Diodes

An embodiment of the fluidic diode is shown in FIGS. 2-3 which comprisesthree layers 200, 202 and 204. The first layer 200 and the second layer202 are preferably rigid substrates having microfluidic componentsthereon. Although rigid substrates are preferred, in certain embodimentstheses layers 200 and 202 may be composed of semi-rigid or elastomericmaterial. The third layer 204 is an elastomeric material that isdeflectable by fluid forces flowing through the fluidic diode. Thiscomponent is characterized by a discontinuous fluidic path 206 in thefirst layer 200, such that if the third layer 204 was sealed against thepatterned side of the first layer no fluid could flow across thediscontinuous path. The patterned side of the second layer 202 is thensealed against the opposite side of the third layer 204, forming athree-layer device in the simplest embodiment with the third layer 204sandwiched between the patterned sides of the first and second layer 200and 202.

The first layer 200 is patterned with a fluidic path 206 having adiscontinuity 208 therein. In a preferred embodiment, the fluidic path206 is patterned such that, immediately upstream of the discontinuity208, the fluid path 206 is significantly wider than the fluid path 206immediately down stream of the discontinuity 208. As illustrated in FIG.2, the upstream fluid path contains a notch 214 where the smaller, downstream fluid path fits therein. Other configurations for thediscontinuity 208 may also be effected as illustrated in FIG. 3. It isdesirable, but not necessary, that the fluid path is designed such thatat a given pressure, the fluid force at the upstream to fluid path issufficient to deflect the elastomeric (third) layer 204, while the samepressure at the downstream fluid path is not sufficient to deflect theelastomeric layer 204. It may also be desirable to design the fluid path206 to be symmetrical around the discontinuity 208. However, when fluidpressure in fluid path 206 is negative (under vacuum), any configurationof this component will seal, inhibiting flow in either direction.

The second layer 202 contains a recess 216 that, when assembled with thefirst and third layers 200 and 204, locates directly above thediscontinuity 208. The alignment of the patterned features of the firstand second layers allows for the displacement of the third layer 204into the second layer 202 when pressure is applied to the fluid in thefirst layer 200. The geometry of the layers and patterned features(including but not limited to thickness, pattern depth and width, andfeature spacing) govern the function of the component.

In one embodiment, the fluid path has the same geometry on either sideof the discontinuous region (FIG. 3B). When the pressure on one side ofthe discontinuity in the first layer generates enough force to displacethe overlapping area of the third layer into the second layer, the fluidin the first layer passes over the discontinuity into the fluid path onthe other side. When the pressure drops to the level at which it can notsustain the displacement of the third layer, the third layer returns toits resting position against the first layer, rendering the fluid pathdiscontinuous. This passive behavior works in either direction providedthe pressure is enough to displace the third layer and the fluid on theother side of the fluid path. While the behavior is similar to that of aburst valve, building pressure until the resistance to flow is overcome,the fluidic diode is reversible and can return to its resting state.When fluid pressure is negative, this component will seal, inhibitingflow in either direction.

In another embodiment, the fluid path has a different geometry on eitherside of the discontinuous region (FIG. 3C). When the pressure on oneside of the discontinuity in the first layer generates enough force todisplace the overlapping area of the third layer into the second layer,the fluid in the first layer passes over the discontinuity into thefluid path on the other side. When the pressure drops to the level atwhich it can not sustain the displacement of the third layer, the thirdlayer returns to its resting position against the first layer, renderingthe fluid path discontinuous. This passive behavior works in onedirection better than another due to the different geometries on eitherside of the discontinuity, and therefore the component exhibits a biasedbehavior to flow similar to that of a diode bias to current in anelectronic circuit. More specifically, a pressure could be applied fromone side and allow flow in that direction, while the same pressure wouldnot cause flow from the other direction.

Fluidic Capacitor

In one embodiment, the fluidic capacitor also contains a three layerstructure as shown in FIGS. 4 and 5. Although this embodiment presents athree-layer device, it may be desirable to use multiple sublayerpatterning in the third, elastomeric layer. The first layer 400 containsa continuous fluid path 402. The second layer 404 contains a patternedrecess 406 that is aligned above a continuous fluid path 402 in thefirst layer 400, with a third layer 408 in between the first and secondlayers 400 and 404. Sealing the third layer against the patterned sidesof the first and second layers 400 and 494 forms a three-layer device ina simplest embodiment, as shown in FIG. 4. The alignment of thepatterned features of the first 400 and second 404 layers allows for thedisplacement of the third layer 408 into the recess 406 of the secondlayer 404 when pressure is applied to the fluid in the first layer.Fluid in the first layer can deflect the third layer into the recess inthe second layer orthogonal to the flow and still flow across thecontinuous path. The geometry of the layers and patterned features(including but not limited to thickness, pattern depth and width, andfeature spacing) govern the function of the component. When the pressureof the fluid in the first layer 400 generates enough force to displacethe overlapping area of the third layer 408 into the recess 406 in thesecond layer 404, the fluid in the first layer is stored in the voidcreated by the deflection of the elastomer (third) layer 408. When thepressure drops to the level at which it can no longer store the volumein the void created by the displacement of the third layer, the thirdlayer 408 returns to its resting position; and all of the flow passesthrough the first fluid path 402. This passive behavior works in eitherdirection provided the pressure is enough to displace the third layerand maintain the fluid flow in the first layer. Similarly, when anegative pressure (vacuum) is applied to the fluid path 402 from eitherdirection, the third layer 408 is displaced into the fluid path 402,thereby storing a negative volume in the void created by the deflectionof the elastomer (third) layer 408. In this manner, the fluidiccapacitor possesses equal functionality under pressure or vacuum.

In a preferred embodiment, the cross-sectional area of the fluid path402 is larger than that of its upstream or downstream channels 410 and412, as shown in FIG. 4. In another embodiment, the fluid path in thefirst layer has the same geometry on either side of the recessed regionin the second layer (FIG. 5B). In yet another embodiment, the fluid pathin the first layer has a different geometry on either side of therecessed region in the second layer (FIG. 5C).

The fluidic capacitor is analogous to a capacitor in the electronicarts. With the present invention, the analogy is proposed for fluidiccapacitance, C, where the elasticity of the third layer serves to storea specific volume of fluid per applied pressure. The flow rate, Q,through a fluidic capacitor is therefore defined by the followingequation:

$\begin{matrix}{Q = {C\frac{P}{t}}} & (1)\end{matrix}$

Equation (1) indicates that a fluid will only flow through a capacitorwhen a change in pressure, P, over time, t, is observed, just as acharge only flows through an electrical capacitor when there is a changein voltage. The value of C (in units of m³ Pa⁻¹), therefore, gives theamount of volume stored in the fluidic capacitor per applied pressure,and is dependent upon the fabrication materials, the device geometry,and the fluids used.

The capacitance (C) of the fluid capacitor may be tuned by controllingthe thickness of the elastomer material and the type of elastomer.Elastomers appropriate for the present invention include, but are notlimited to, polydimethylsiloxane (PDMS), polymethylmethacrylate (PMMA)polyisoprene, polybutadiene, polychloroprene, polyisobutylene,poly(styrene-butadiene-styrene), polyurethanes, silicone polymers,poly(bis(fluoroalkoxy)phosphazene) (PNF, Eypel-F),poly(carborane-siloxanes) (Dexsil), poly(acrylonitrile-butadiene)(nitrile rubber), poly(1-butene),poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers (Kel-F),poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidenefluoride-hexafluoropropylene)copolymer (Viton), elastomeric compositionsof polyvinylchloride (PVC), polysulfone, polycarbonate,polytertrafluoroethylene (Teflon), and blends thereof. PDMS is thepreferred elastomeric material for the present invention.

In certain embodiments, the elastomeric (third) layer 408 can containmore than one sublayers. FIG. 16 is a drawing showing one method tolocally control the thickness of the elastomeric layer by introducingmultiple sublayers into the elastomeric layer 408. FIG. 16A shows twopossible embodiments of the typical three-layer device. FIG. 16B showsone fabrication method to locally control the thickness of the middleelastomeric layer. In this embodiment, locally thinned regions arecreated. Fluidic capacitance in the locally thinned regions will beincreased. Another embodiment of this method is to createprecisely-localized thickened regions on the membrane. Fluidiccapacitance in the locally-thickened regions will be decreased.Therefore, by using more than one sublayers in the elastomeric layer408, capacitance may be controlled by thinning or thickening of thelayer above the fluid path 402.

Fluidic Inductor

The fluidic inductor (FIG. 6) is a three layer structure, where thesecond layer 602 is aligned above a continuous fluidic path 606 in thefirst layer 600, with a third layer 604, sealing against the first orsecond layer 600 or 602. The third layer 604 comprises atemperature-controlled plate 610 mated with the first fluidic layer toprovide a means of heat transfer from the third layer 604 to the fluid.The alignment of the patterned features of the first layer with those ofthe third layer allows for localization of heated regions on the device.Fluid in the fluid path 606 that is heated by the third layer 604possesses a lower density at equilibrium than the remainder of thesolution in the first layer. Any changes in flow will be influenced bythe changing density at the heated regions. The geometry of the firstlayer is such that the entering fluid will be heated more slowly thanthe exiting solution will be cooled. The geometry of the layers andpatterned features (including but not limited to thickness, patterndepth and width, and feature spacing) govern the function of thecomponent. As illustrated in FIG. 6, an optional fourth layer 608 ofelastomeric material may be present. This optional layer simplifiesconstruction of the μ-TAS that also contains other passive structures,such as the fluidic diode and the fluidic capacitor discussed above.When the pressure of the fluid in the first layer induces flow in theheated is regions, the heat energy is transferred from the fourth layerinto the entering fluid, and the heat energy is transferred from thedeparting heated fluid into the substrate of the first layer. Because ofthe specific geometry of the inductor, the heat is transferred morerapidly from the departing heated fluid into the substrate of the firstlayer than is transferred from the fourth layer into the entering fluid.This difference in heat transfer properties gives a phase shift betweeninput and output pressures and defines the behavior of the component.

In a preferred embodiment, the heated region of the fluid path 606preferably contains a sinuous path to increase the amount of fluid beingheated. In another embodiment, the fluid path in the first layer has thesame geometry on either side of the heated region in the fourth layer(FIG. 7B). In yet another embodiment, the fluid path in the first layerhas a different geometry on either side of the heated region in thefourth layer (FIG. 7C).

In either aforementioned embodiment, the fluidic inductor is proposed tobe analogous to an inductor in the electronic arts. With the presentinvention, the analogy is proposed for fluidic inductance, L, where thedensity of the fluid in the first layer serves to store a specificvolume of fluid per applied volumetric flow rate, Q. The pressure drop,ΔP, through a fluidic inductor is therefore defined by the followingequation:

$\begin{matrix}{{\Delta \; P} = {L\frac{Q}{t}}} & (2)\end{matrix}$

Equation (2) indicates that a pressure drop will only be induced throughan inductor when a change in volumetric flow rate, Q, over time, t, isobserved. This is similar to an electrical inductor, where a voltagedrop is only induced when there is a change in current. The value of L(in units of kg m⁻⁴) includes a density term (in kg m⁻³), whichhighlights the temperature dependence of the fluidic inductor due to thetemperature dependence of fluid density. This term is dependent upon thefabrication materials, the device geometry, the temperature of theplate, and the fluids used. Fluidic inductance can be tuned by alteringthe heat transfer properties of the entrance or exit channels, byaltering the temperature of the plate, or by altering the type andidentity of fluid used. Similarly, inductance can also be tuned bychanging the geometry of the fluid path. In certain embodiments, thefluid path can be smaller or larger in cross sectional area than itsupstream or downstream channels. In other embodiments, the fluid pathcan be lengthened by a sinuous path.

This behavior is not limited to localization of heated regions. Thethird layer 604 of this component could also contain localized cooledregions, in which case the heat flow characteristics of the fluidicinductor would be in the opposite direction.

Fluidic Resistor

Resistance to fluid flow in a microchannel is analogous to electricalresistance and is described by the following equation (S. Attiya et al.,2001, Electrophoresis 22:318)

$\begin{matrix}{{\Delta \; P} = {{\frac{Q}{A}\left( \frac{\eta \; L}{wdf} \right)} = {Q\left( \frac{4\eta \; L}{({wd})^{2}F} \right)}}} & (3)\end{matrix}$

where ΔP is the pressure drop along the microchannel; Q is the flowrate; and (4 ηL)/[(wd)²F] is the resistance (R) (w, d, and L are thehalf-width, half-depth, and length of the microchannel; η is theviscosity of the fluid; and F is a geometric form factor, in the case ofmicrochannels, F 0.0566 dwr³−0.262 dwr²+0.347 dwr−0.000699, where dwr isthe depth to width ratio). Equation 3 is analogous to the electricalresistor where V=IR. Further, according to equation 3, the fluidicresistor can be tuned by varying the length, width, depth, or formfactor of the microchannel.

Microfluidic Circuits

The passive components described above can be used in combination in amicrofluidic circuits to achieve results similar to an electricalcircuit. These microfluidic circuits can be used to rectify fluid flow,eliminating negative flow typically associated with valve-basedmicropumps; and to control directions and flow rates in a μ-TAS withoutrequiring externally controlled instrumentations. Importantly, aproperly designed microfluidic circuit facilitates control of flow ratesand directions only by varying the input frequency, usually that of thepump.

Fluidic Rectifier

In one embodiment, an input pressure source (micro-fluidic diaphragmpump, syringe pump, etc.) could be combined with the passive diode toeliminate negative flow (or ‘pullback’). For example, diaphragm orperistaltic pumps made from three or more micro-fluidic valves possessan inherent flow reversal due to the cyclic nature of the pumping.Though the overall volumetric flow is positive, there exist negativeflow regions in each pumping cycle which could be detrimental to manyapplications requiring smooth delivery of fluid. It would be desirableto place a passive micro-fluidic diode in series with this type of pumpto eliminate the flow reversal problem—allowing flow in the positivedirection only—while simultaneously reducing the number of valvesnecessary for a diaphragm pump. This action would be similar to ahalf-wave flow rectifier in electrical circuitry. FIG. 5A shows thedesign described by prior art of a three-valve micro-fluidic diaphragmpump. FIG. 8B shows the fluidic diode, described in the presentinvention, where a fluidic diode is placed in series with the diaphragmpump. FIG. 5C shows the measured volumetric displacements and flow ratesfor each configuration. These measurements clearly show that the fluidicdiode behaves as predicted, acting here as a half-wave flow rectifier.The fluidic circuit is therefore referred to as a unidirectionalmicro-fluidic pump. Note also that the inclusion of the fluidic diodeeliminates the need for the exiting gate valve in the micro-fluidicdiaphragm pump, thereby reducing the number of control lines needed. Incertain embodiments, the fluidic diode can eliminate the need for boththe entry and exit gate valves, producing a unidirectional pump usingonly one active valve.

In yet another embodiment, an input pressure source could be combinedwith several passive diodes to function as a full-wave flow rectifier.

In another embodiment, an input pressure source could be combined withseveral passive diodes to function as a bridge rectifier.

Fluidic Frequency Filter

In another embodiment, an input pressure source could be combined withthe passive diode and inductor or capacitor to function as a flowprofile converter. Essentially, a micro-fluidic capacitor (or inductor)could be placed in parallel (or in series) with the unidirectionalmicro-fluidic pump above to dampen the flow, providing means for energystorage in the form of fluid volume. With these types of components, thepulsating, multidirectional flow profile from a typical diaphragm pumpcould be converted or shaped into a smooth, unidirectional flow profilein a manner analogous to AC-to-DC transformers in the electronic arts.Thus, the flow control of small volumes (microliter, nanoliter,picoliter, etc.) could be greatly enhanced while significantly reducingthe complexity of the control instrumentation. For example, FIG. 9 showsa fluidic capacitor arranged in parallel with the unidirectionalmicro-fluidic pump from above to give a micro-fluidic low-pass filterconfiguration. FIG. 9A shows the patterned channel structures of thisembodiment. FIG. 9B shows the measured volumetric displacements and flowrates from both the unidirectional pump (before capacitor) and thedampened flow (after capacitor). The input flow was pulsed at 4.0 Hz,which was clearly filtered out of the output from the capacitor. Themicro-fluidic low-pass filter shown here was measured to have afrequency cutoff, f₀, of approximately ˜0.2 Hz. This embodiment couldalso function as an integrator of the input pressure profile.Furthermore, the frequency response of this embodiment could allowpreferential flow in specific directions based on the input frequency.

In another embodiment, a combined device consisting of a half-waverectifier, diodes, and various capacitors is arranged to create a timingcircuit (FIG. 10) based upon four low-pass filters arranged in parallelwith a shared output.

In another embodiment, an input pressure source could be combined afluidic capacitor in series or a fluidic inductor in parallel to providea micro-fluidic high-pass filter configuration. This embodiment couldalso function as a differentiator of the input pressure profile.Furthermore, the frequency response of this embodiment could allowpreferential flow in specific directions based on the input frequency.This embodiment could also be combined with the fluidic diode to impartdirectional nature to the flow.

In another embodiment, an input pressure source could be combined with afluidic capacitor in parallel or a fluidic inductor in series to providea micro-fluidic high-pass filter configuration. This embodiment can alsofunction as an integrator of the input pressure profile. Furthermore,the frequency response of this embodiment could allow preferential flowin specific directions based on the input frequency. This embodimentcould also be combined with the fluidic diode to impart directionalnature to the flow.

In another embodiment a bandpass filter can be created from passivefluidic components using a combination of an input pressure source withfluidic resistors (channels) coupled with either capacitors (FIG. 11A)or inductors (FIG. 11B). This embodiment could also be combined with thefluidic diode to impart directional nature to the flow.

Passive Fluidic Timer

In one embodiment, a fluidic timer can be developed using combinatorialfluidic circuits, which enables passive timing on a microfluidic device,where the flow behavior is pre-programmed into the device architecture,without requiring external controls. A sample mask design for thisdevice is given in FIG. 12. The device contains of a single syringe pumpinput that was split into four fluidic paths, each consisting of acapacitor flanked by two rectifiers. The concept of the timing circuitis that the different charging times of the capacitors (differentfluidic capacitance) result in different breakthrough times through theoutput rectifier. In the absence of such passive components in thecircuit, flow through all of the output fluidic channels (resistors)would initiate at the onset of syringe pump flow. However, because theto capacitors function as designed, the output flows are selectivelydelayed with a single constant input flow. As shown in FIG. 12, two ofthe flow paths are shown, With syringe pump flow initiated at t=0.0,solution in path 1 began flowing at t₁, (for example, t=3.7 s), andsolution in path 2 began flowing at t₂ (for example, t=4.5 s).

Passive Pressure Meter

In order to measure and characterize the various devices presented andalluded to here, a fluidic pressure meter is presented (FIG. 13), wherea large resistance (relative to the channel being measured, at least 10times larger, preferably 100-1000 times larger) is fabricated throughchannel dimension and geometry and connected to ground (atmosphericpressure), where flow can be interrogated to provide pressureinformation. The pressure meter is constructed of three layers, similarto the fluidic capacitor described above. The fluid path of the pressuremeter, however, is designed to be high resistance. This usually meansthat the depth and/or width of the fluid path is much smaller and thatof the main channel where the pressure is to be interrogated, Thedeflection of the elastomeric layer into the recess of the top (second)layer (which is connected to atmospheric pressure) is proportional tothe pressure in the fluid path and can be measured using a distancemeasurement technique, for example, an extrinsic Fabry-Perotinterferometer (EFPI).

The pressure meter can be connected to various fluidic components foranalyzing and characterizing a micro-fluidic circuit (FIG. 13B). Anembodiment of a sample component with built-in discontinuity forflexible testing is presented in FIG. 13C. Under normal operation (top)the fluidic channel is bridged by a short channel. For testing ortroubleshooting, the fluidic channel is bridged by a short channelconnected to a pressure meter (bottom). Note that the pressure meter ismodular and can be used on any component in any circuit provided thediscontinuity is patterned into the fluid layer.

Without further description, it is believed that one of ordinary skillin the art can, using the preceding description and the followingillustrative example, make and utilize the compounds of the presentinvention and practice the methods. The following example is given toillustrate the present invention. It should be understood that theinvention is not to be limited to the specific conditions or detailsdescribed in the example.

Example

Because frequency dependence could be designed into the microfluidicarchitecture using passive components, it became clear that thecharacteristic frequency of these networks is controllable. If so, itwas hypothesized that relative flow rates of individual flow pathswithin the same networks could be metered in a valveless, unhinderedflow network. It was postulated that the characteristic frequency of thefluidic networks could be shifted by simply altering the capacitance inthe fluidic circuit.

A new microdevice with unbroken fluidic networks (no valved flow paths)was designed. As shown by the mask designs in FIG. 14A, in lieu of avalve-based pump, the device included a single actuation chamber above acapacitor (the ‘source capacitor’), several fluidic resistors, as wellas an additional capacitor (the ‘measurement capacitor’) isolated fromthe source by a resistor. The electrical circuit equivalent to the newdesign is shown in FIG. 14B (where the resistances are reported in Pa sμm⁻³, capacitances in μm³ Pa⁻¹), with the EFPI measurement illustratedby a multi-meter device over the measurement capacitor. Note that in thefluidic circuit (FIG. 14A) the capacitors appear to be arranged inseries with the resistors (R2 and R3); however, in the electricalcircuit equivalent (FIG. 14B), the capacitors are in parallel with theseresistors. This is because in the fluidic capacitor stores fluid in adirection perpendicular to the direction of fluid flow. As such,although it is fluidly in series with the resistor, the electricalanalog is in parallel. In this application, where “series” and“parallel” are mentioned, it is in the fluidic sense rather than itselectrical equivalent. The layout of this fluidic circuit places theinput waveform from the vacuum or pressure source in series withcapacitor C_(2src) and in parallel with capacitor C_(2m), resulting in aband-pass filter configuration.

The frequency response of this device was measured using EFPI tovisualize the deflection of the measurement capacitors. Vacuum pulses atvarious frequencies were applied to the source capacitor (C_(2src)),while the EFPI sensor was used to measure the deflection of the membraneof capacitor C_(2m) in a non-contact manner.

By varying the thickness of the elastomeric layer of the capacitor(using the method outlined in FIG. 16), the characteristic frequency canbe shifted significantly. FIG. 15 shows the results of threecombinations of capacitor membrane thicknesses using the same devicedesign of FIG. 14: 1) ˜50 μm membrane at C_(2m) and ˜300 μm at C_(2src);2) ˜250 μm membrane at both C_(2m) and C_(2src); and 3) ˜250 μm membraneat C_(2m) and ˜500 μm at C_(2src); whose frequency responses wereevaluated using EFPI. By varying the capacitance and resistance usingthe passive components, the characteristic frequencies of fluidicnetworks can be shifted. This enables the ability to control flow ratesand direction of fluids in a μ-TAS with a single input source by varyingthe input frequency, eliminating the need for the instrumentation thatis usually necessary for microfluidic valving.

Although certain presently preferred embodiments of the invention havebeen specifically described herein, it will be apparent to those skilledin the art to which the invention pertains that variations andmodifications of the various embodiments shown and described herein maybe made without departing from the spirit and scope of the invention.Accordingly, it is intended that the invention be limited only to theextent required by the appended claims and the applicable rules of law.

1. A fluidic capacitor comprising a first layer having a continuousfluid path thereon; a second layer having a recess thereon; a thirdlayer of elastomeric material, wherein the third layer is sandwichedbetween the first layer and second layer such that the recess is indirect alignment with the fluid path.
 2. The fluidic capacitor of claim1, wherein the fluid path of the capacitor is larger than that of itsupstream or downstream channels.
 3. The fluidic capacitor of claim 1,wherein the thickness of the elastomeric layer is about 5 μm-10 mm. 4.The fluidic capacitor of claim 1 wherein the first and second layer aremade of a material selected from the group consisting of silicon, glass,ceramics, polymers, metals, and quartz.
 5. The fluidic capacitor ofclaim 1, wherein the elastomeric material is selected from the groupconsisting of polydimethylsiloxane (PDMS), polymethylmethacrylate (PMMA)polyisoprene, polybutadiene, polychloroprene, polyisobutylene,poly(styrene-butadiene-styrene), polyurethanes, silicone polymers,poly(bis(fluoroalkoxy)phosphazene) (PNF, Eypel-F),poly(carborane-siloxanes) (Dexsil), poly(acrylonitrile-butadiene)(nitrile rubber), poly(1-butene),poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers (Kel-F),poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidenefluoride-hexafluoropropylene)copolymer (Viton), elastomeric compositionsof polyvinylchloride (PVC), polysulfone, polycarbonate,polytertrafluoroethylene (Teflon), and blends thereof.
 6. The fluidiccapacitor of claim 1, wherein $Q = {C\frac{P}{t}}$ where Q is thefluid flow rate, C is the capacitance of the capacitor, and dP/dt is thechange in fluid pressure over time.
 7. The fluidic capacitor of claim 1,wherein the third layer comprises at least two sublayers.
 8. A fluidicinductor comprising a first layer having a continuous fluid paththereon; a second layer adjacent to the first layer and enclosing thefluid path; and a third layer sealing against the first or second layerand having a heating or cooling element thereon, wherein the heating orcooling element is in direct alignment with the fluid path.
 9. Theinductor of claim 8, further comprising a fourth layer of elastomericmaterial sandwiched between the first and second layer.
 10. The inductorof claim 8, wherein the elastomeric material is selected from the groupconsisting of polydimethylsiloxane (PDMS), polymethylmethacrylate (PMMA)polyisoprene polybutadiene, polychloroprene, polyisobutylene,poly(styrene-butadiene-styrene), polyurethanes, silicone polymers,poly(bis(fluoroalkoxy)phosphazene) (PNF, Eypel-F),poly(carborane-siloxanes) (Dexsil), poly(acrylonitrile-butadiene)(nitrile rubber), poly(1-butene),poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers (Kel-F),poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidenefluoride-hexafluoropropylene)copolymer (Viton), elastomeric compositionsof polyvinylchloride (PVC), polysulfone, polycarbonate,polytertrafluoroethylene (Teflon), and blends thereof.
 11. The inductorof claim 8, wherein the first and second layer are made of a materialselected from the group consisting of silicon, glass, ceramics,polymers, metals, and quartz.
 12. The inductor of claim 8, wherein thefluid path is in a sinuous configuration or has a smaller or largercross sectional than its upstream and downstream channels.
 13. Theinductor of claim 8, wherein ${\Delta \; P} = {L\frac{Q}{t}}$ whereΔP is the pressure drop through the inductor, L is the inductance of theinductor, and dQ/dt is the change of fluid flow rate over time.
 14. Amicrofluidic circuit comprising a fluidic capacitor, wherein the fluidiccapacitor comprises (i) a first layer having a continuous fluid paththereon; (ii) a second layer having a recess thereon; (iii) a thirdlayer of elastomeric material, wherein the third layer is sandwichedbetween the first layer and second layer such that the recess is indirect alignment with the fluid path.
 15. The microfluidic circuit ofclaim 14, further comprising a fluidic inductor, wherein the fluidicinductor comprises (i) a first layer having a continuous fluid paththereon; (ii) a second layer adjacent to the first layer and enclosingthe fluid path; and (iii) a third layer sealing against the first orsecond layer and having a heating or cooling element thereon, whereinthe heating or cooling element is in direct alignment with the fluidpath.
 16. The microfluidic circuit of claim 15, wherein the fluidiccapacitor and fluidic inductor are in series or parallel.
 17. Amicrofluidic circuit comprising a fluidic inductor, wherein the fluidicinductor comprises (i) a first layer having a continuous fluid paththereon; (ii) a second layer adjacent to the first layer and enclosingthe fluid path; and (iii) a third layer sealing against the first orsecond layer and having a heating or cooling element thereon, whereinthe heating or cooling element is in direct alignment with the fluidpath.
 18. A method for controlling flow rate and direction of fluid in amicro-total analysis system (μ-TAS) comprising the steps of providingthe microfluidic circuit of claim 14; and pumping fluid through themicrofluidic circuit at varying flow rates.
 19. The method of claim 18,wherein the microfluidic circuit further comprising a fluidic inductor,wherein the fluidic inductor comprises (i) a first layer having acontinuous fluid path thereon; (ii) a second layer adjacent to the firstlayer and enclosing the fluid path; and (iii) a third layer sealingagainst the first or second layer and having a heating or coolingelement˜thereon, wherein the heating or cooling element is in directalignment with the fluid path.
 20. The method of claim 19, wherein thefluidic capacitor and fluidic inductor are in series or parallel. 21.The method of claim 18, wherein the pumping step takes place at apredetermined frequency.
 22. A method for controlling flow rate anddirection of fluid in a micro-total analysis system (μ-TAS) comprisingthe steps of providing the microfluidic circuit of claim 8; and pumpingfluid through the microfluidic circuit at varying flow rates.
 23. Themethod of claim 22, wherein the pumping step takes place at apredetermined frequency.